JPH022830U - - Google Patents
Info
- Publication number
- JPH022830U JPH022830U JP7907888U JP7907888U JPH022830U JP H022830 U JPH022830 U JP H022830U JP 7907888 U JP7907888 U JP 7907888U JP 7907888 U JP7907888 U JP 7907888U JP H022830 U JPH022830 U JP H022830U
- Authority
- JP
- Japan
- Prior art keywords
- sample stage
- coating film
- top surface
- thermal conductivity
- semiconductor devices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7907888U JPH022830U (en]) | 1988-06-15 | 1988-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7907888U JPH022830U (en]) | 1988-06-15 | 1988-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH022830U true JPH022830U (en]) | 1990-01-10 |
Family
ID=31303966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7907888U Pending JPH022830U (en]) | 1988-06-15 | 1988-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH022830U (en]) |
-
1988
- 1988-06-15 JP JP7907888U patent/JPH022830U/ja active Pending